发明名称
摘要 A polycrystalline silicon thin film to be used in display devices, the thin film comprising adjacent primary grain boundaries that are not parallel to each other and do not contact each other, wherein an area surrounded by the primary grain boundaries is larger than 1 μm2, a fabrication method of the polycrystalline silicon thin film, and a thin film transistor fabricated using the method.
申请公布号 JP4454333(B2) 申请公布日期 2010.04.21
申请号 JP20040033412 申请日期 2004.02.10
申请人 发明人
分类号 G02F1/136;H01L21/20;B23K26/073;H01L21/00;H01L21/268;H01L21/336;H01L21/77;H01L21/84;H01L27/15;H01L29/04;H01L29/26;H01L29/786;H01L31/036;H01L31/12;H05B33/00 主分类号 G02F1/136
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