| 摘要 |
<p><P>PROBLEM TO BE SOLVED: To provide an automated wafer temporary storage system and a control method thereof. <P>SOLUTION: The automated wafer temporary storage system 1 includes an analysis decision module 11 and a temporary storage unit 12. The analysis decision module analyzes the relative positions of the temporary storage unit, a transport carrier 21, and an idle table and controls the position of the temporary storage unit to the optimum position. The transport carrier also moves to the optimum position to receive a wafer 4 temporarily stored in the temporary storage unit. Finally, the transport carrier transports the wafer to the idle table to process the wafer. Further, a control method of the automated wafer temporary storage system is provided. <P>COPYRIGHT: (C)2010,JPO&INPIT</p> |
