发明名称 MELT PURIFICATION AND DELIVERY SYSTEM
摘要 An apparatus to purify a melt is disclosed. A first portion of a melt in a chamber is frozen in a first direction. A fraction of the first portion is melted in the first direction. A second portion of the melt remains frozen. The melt flows from the chamber and the second portion is removed from the chamber. The freezing concentrates solutes in the melt and second portion. The second portion may be a slug with a high solute concentration. This system may be incorporated into a sheet forming apparatus with other components such as, for example, pumps, filters, or particle traps.
申请公布号 WO2009155512(A3) 申请公布日期 2010.04.08
申请号 WO2009US47947 申请日期 2009.06.19
申请人 VARIAN SEMICONDUCTOR EQUIPMENT ASSOCIATES;KELLERMAN, PETER, L.;SINCLAIR, FRANK;CARLSON, FREDERICK;BLAKE, JULIAN, G. 发明人 KELLERMAN, PETER, L.;SINCLAIR, FRANK;CARLSON, FREDERICK;BLAKE, JULIAN, G.
分类号 C30B13/16;C30B13/14 主分类号 C30B13/16
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