| 摘要 |
PURPOSE: A shaft apparatus for conveying a substrate using the gas pressure is provided to prevent deflection of a transferring shaft by supplying the gas pressure into the inside of the transferring shaft which transfers a substrate. CONSTITUTION: A shaft(310) is shaped like a tube, and includes a plurality of holes(315) on the external side. A second shaft(320) has the same center of rotation as the shaft. A gas supply part supplies the gas into the inside of the shaft. The provided gas is provided through a plurality of holes inside the second shaft, in order to prevent deflection of the second shaft.
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