| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a method of manufacturing an inkjet head excelling in reliability by reducing metal residues in mutual insulating sections of electrodes to prevent an electric short circuit between the electrodes. Ž<P>SOLUTION: The surface of a substrate 1 is etched, and the surface of the substrate 1 is provided with piezoelectric members 15, 13. A metal film 22 is formed on the surfaces of the piezoelectric members 15, 13 and substrate 1, and laser patterning processing is applied to the metal film 22 to form a plurality of electrodes P2. Prior to forming the metal film 22, the forming predetermined portions of the respective electrodes P2 on the etched surface of the substrate 1 is smoothed beforehand by irradiation of laser beams. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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