| 摘要 |
<p>A device has a micro electromechanical structure (10) with a first arm (102), at least one second arm (1 04a, b) connected to each other via a connection (100). Both arms (102, 104a, b) and the connection (100) are preferably made of a single crystalline body. The first and second arm (102, 1 04a, b) have end portions attached to a substrate, but otherwise the arms and their connection are free to move relative to the substrate. The first and second arm (102, 1 04a, b) extending from the end portions to the connection (100) along different directions, preferably perpendicularly to each other. An electrode (12) is provided on the substrate, adjacent to the micro electromechanical structure (10) to excite vibration of the structure. The two arms in different directions make it possible to reduce the nonlinearity of the stiffness during vibrations of the structure.</p> |
