THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME
摘要
<p>PURPOSE: A thin film transistor and a manufacturing method thereof are provided to obtain the thin film having low leakage current and off current characteristics by forming a metal material on the surface of a channel. CONSTITUTION: A thin film transistor(TFT) comprises a gate(11), a gate isolation layer(12), a channel(14), a metal material(13), and a source(16a) / drain(16b). The gate isolation layer is included on the gate. The channel is formed in a position corresponding t o the gate of the gate insulation layer. The metal material is formed on the surface of the channel for crystallization of the channel. The source/drain is respectively touched with both sides of the channel.</p>
申请公布号
KR20100034634(A)
申请公布日期
2010.04.01
申请号
KR20080093862
申请日期
2008.09.24
申请人
SAMSUNG ELECTRONICS CO., LTD.
发明人
YOO, BYUNG WOOK;LEE, SANG YOON;RYU, MYUNG KWAN;KIM, TAE SANG;KWON, JANG YEON;PARK, KYUNG BAE;SON, KYUNG SEOK;JUNG, JI SIM