发明名称 THIN FILM TRANSISTOR AND MANUFACTURING METHOD OF THE SAME
摘要 <p>PURPOSE: A thin film transistor and a manufacturing method thereof are provided to obtain the thin film having low leakage current and off current characteristics by forming a metal material on the surface of a channel. CONSTITUTION: A thin film transistor(TFT) comprises a gate(11), a gate isolation layer(12), a channel(14), a metal material(13), and a source(16a) / drain(16b). The gate isolation layer is included on the gate. The channel is formed in a position corresponding t o the gate of the gate insulation layer. The metal material is formed on the surface of the channel for crystallization of the channel. The source/drain is respectively touched with both sides of the channel.</p>
申请公布号 KR20100034634(A) 申请公布日期 2010.04.01
申请号 KR20080093862 申请日期 2008.09.24
申请人 SAMSUNG ELECTRONICS CO., LTD. 发明人 YOO, BYUNG WOOK;LEE, SANG YOON;RYU, MYUNG KWAN;KIM, TAE SANG;KWON, JANG YEON;PARK, KYUNG BAE;SON, KYUNG SEOK;JUNG, JI SIM
分类号 G02F1/136;H01L29/786 主分类号 G02F1/136
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