MATERIAL PROVIDING UNIT AND APPARATUS FOR DEPOSITIONING THIN FILM HAVING THE SAME AND MATERIAL PROVIDING METHOD

摘要

PURPOSE: A raw material supplying unit, a thin film depositing device including the same, and a method for supplying raw materials are provided to prevent the denaturalization of raw materials due to heat by distributing a large amount of raw materials and then supplying a small amount of raw materials to a plurality of evaporation sources. CONSTITUTION: A plurality of evaporation sources(320) stores raw materials and includes an evaporation path for evaporating the raw materials. A distribution unit(310) distributes the raw materials evaporated from at least one of the evaporation sources to a plurality of distribution paths and discharges the raw materials. A transfer unit selects at least one of the evaporation sources and transfers the selected evaporation source to connect the evaluation path to the distribution path.