| 摘要 |
PURPOSE: A photosensitive solution coater is provided to easily setting work for horizontality of a nozzle support material combined with a slit nozzle and to increase precision. CONSTITUTION: A photosensitive solution coater comprises a worktable(1), pillars(7,9) which is coupled with the worktable and spaced in a certain distance, vertical drivers(11,13) coupled with each pillar, a nozzle support material(19) moved in a vertical direction by driving vertical drivers, a slit nozzle(21) which is coupled with the nozzle support material and discharges a drug solution on a substrate; and displacement difference control units(15,17). |
