发明名称 Conveying e.g. sheets of architectural glass or photovoltaic cells through vacuum coating plant, periodically corrects their relative positions
摘要 <p>The substrate (1) is moved through the plant on a conveying system. Substrates are carried adjacently, at right angles to the path of movement. Their resting positions relative to each other are corrected at one or more locations along the path. This orientates front edges of the substrates in a straight line transverse to the conveying direction. Positional correction is carried out by the action of a mechanical barrier. Once correction is complete, the barrier is removed from the transport path. As required, the barrier is moved into or out from the transport path. Correction takes place in transition regions between adjacent functional zones of the vacuum chamber. The barrier is a flap (4) across the conveying direction; this is swung or moved in a vertical direction. It is optionally arranged along the transport path, and swings or is moved horizontally. The conveying system comprises rollers (2) and the barrier is an alignment component (5) located between two of them. For correction, a lifting device raises the substrate from the conveying system. The lifting device includes lifting components, especially lifting bars (6) between pairs of rollers, at right angles to the conveying direction. The bars have gas flow openings on the sides facing the substrates. The rollers themselves can act simultaneously as conveying and lifting components. They are hollow-cylindrical and include gas flow openings facing the substrates. A gas flow line is arranged inside the rollers. This has one or more openings facing the substrate. An independent claim IS INCLUDED FOR corresponding equipment.</p>
申请公布号 DE102008030678(B3) 申请公布日期 2010.03.25
申请号 DE20081030678 申请日期 2008.07.01
申请人 VON ARDENNE ANLAGENTECHNIK GMBH 发明人 WAYDBRINK, HUBERTUS VON DER;GOTTSMANN, LUTZ;HUHN, MICHAEL;SCHIMMING, MARCO;BOCK, THOMAS;DUTKOWIAK, ANDREAS;WILLKOMMEN, UDO
分类号 C23C14/56 主分类号 C23C14/56
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