| 摘要 |
On a cover (3) of a vacuum processing chamber (2), a groove (150) is annularly formed along the periphery of an opening section to be a gas channel. In the groove (150), a metal seal (140), which has an annular shape (O-ring shape) as a whole and a double structure, is arranged. On the cover (3), an annular recessed section (160) is formed to surround the periphery of the groove (150), on the outer portion of the groove (150). On the side of a flange section (130), an annular protruding section (170) which corresponds to the recessed section (160) is formed. In the recessed section (160), a fitting mechanism (180) for fitting the protruding section (170) is constituted.
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