发明名称 STORED ARTICLE TRANSFER SYSTEM
摘要 PROBLEM TO BE SOLVED: To provide a stored article transfer system capable of reducing its occupying area to a floor area in a precious clean room. SOLUTION: The stored article transfer system is provided with a stored article transfer device and a storage. The stored article transfer device is provided with a plurality of loading sections for loading containers for storing articles to be stored and a stored article transfer device for transferring the article to be transferred between respective containers loaded on respective loading sections. The storage is provided with racks for loading the containers and a container transfer device for transferring containers between the racks and the loading sections. In the stored article transfer device, the respective loading sections are aligned in the height direction of the stored article transfer device. In the storage, the group of racks aligned in the height direction are respectively arranged in the aligning direction of the stored article transfer device and the storage at locations having the container transfer device between them. With these structures, it is possible to reduce the occupying area of the stored article transfer system in the floor area in the precious clean room. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2010058937(A) 申请公布日期 2010.03.18
申请号 JP20080228129 申请日期 2008.09.05
申请人 ASYST TECHNOLOGIES JAPAN INC 发明人 YAMAJI TAKASHI;MURATA MASANAO
分类号 B65G1/00;H01L21/673;H01L21/677 主分类号 B65G1/00
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