| 摘要 |
PROBLEM TO BE SOLVED: To provide a diamond probe which can be efficiently produced in large quantities, has a tip diameter that allows a scanning-probe microscope to perform observation with high resolution and microfabrication with high precision and a needle having sufficient length for performing structure observation with a high aspect ratio, and being wear resistant, to provide a cantilever comprising the same for a scanning-probe microscope, to provide a photomask-correcting probe, and to provide an electron beam source. SOLUTION: A diamond needle having a length, which is difficult to be fabricated by, for example, reactive-ion etching, is fabricated by thermochemical processing, and the tip portion of the diamond needle is sharpened by plasma etching or by growing the tip portion with microwave plasma CVD. Thus, the sharpened diamond needle 5 that can be efficiently produced in large quantities can be obtained. The cantilever for the scanning-probe microscope comprises at least one or a plurality of sharpened diamond needles 5 as the probe. COPYRIGHT: (C)2010,JPO&INPIT |
