发明名称 |
METHOD FOR QUANTITATIVE ANALYSIS OF A MATERIAL |
摘要 |
<p>A method and apparatus for quantitative analysis of a material in which an electron beam is caused to impinge upon the material are described. The method comprises detecting low loss electrons (LLEs) received from a first region of the material due to interaction with the electron beam and generating corresponding LLE data. The method further comprises detecting x-rays received from a second region of the material due to interaction with the electron beam and generating corresponding x-ray data, wherein the first and second regions overlap, and analysing the LLE data together with the x-ray data so as to generate compositional data representative of the composition of the first region.</p> |
申请公布号 |
EP2162733(A1) |
申请公布日期 |
2010.03.17 |
申请号 |
EP20080762437 |
申请日期 |
2008.06.20 |
申请人 |
OXFORD INSTRUMENTS ANALYTICAL LIMITED |
发明人 |
STATHAM, PETER, JOHN;BARKSHIRE, IAN, RICHARD |
分类号 |
G01N23/225;H01J37/26 |
主分类号 |
G01N23/225 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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