发明名称 CHEMICAL LIQUID FEEDING DEVICE
摘要 <p>The present invention relates to a chemical liquid feeding device for feeding chemical liquid required in a semiconductor fabrication process, which includes three or more pumps arranged in a line, each pump having different time points of suction stroke and discharge stroke from one another so that the chemical liquid can be fed uniformly without pulsation.</p>
申请公布号 WO2010024488(A1) 申请公布日期 2010.03.04
申请号 WO2008KR05329 申请日期 2008.09.10
申请人 C&G HI TECH CO., LTD;HONG, SA MUN;KIM, HYUNG IL 发明人 HONG, SA MUN;KIM, HYUNG IL
分类号 H01L21/304 主分类号 H01L21/304
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