| 摘要 |
PROBLEM TO BE SOLVED: To suppress the discharge of a unreacted sterilization substance minimum when applying sterilization treatment between during last time operation and following time operation and to quickly make an isolator the state where the next operation can be started. SOLUTION: The isolator 100 includes an operation chamber 10, a gas feeding section 40, a fan 46, a gas discharge section 50, a sterilization substance reducing treating section 54, a concentration measure section 56, a path 74 having an HEPA filter 20, a sterilization substance feed section 30, and a control section 90. After feeding the sterilization substance to the operation chamber 10 and sterilizing while maintaining the concentration of the sterilization substance in the operation chamber 10 constant, the control section 90 starts air discharge using the fan 46 and makes the air discharge amount when the completion of the air discharge higher than the air discharge amount when the concentration of the sterilization substance reaches the maximum concentration. Thereby, the discharge of the unreacted sterilization substance can be suppressed to minimum and the sterilization treatment time can be shortened by effective air discharge. COPYRIGHT: (C)2010,JPO&INPIT |
