| 发明名称 |
Sandwiched metal structure silicidation for enhanced contact |
| 摘要 |
Embodiments of an apparatus and methods for forming enhanced contacts using sandwiched metal structures are generally described herein. Other embodiments may be described and claimed.
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| 申请公布号 |
US2010052166(A1) |
申请公布日期 |
2010.03.04 |
| 申请号 |
US20080229881 |
申请日期 |
2008.08.26 |
| 申请人 |
MUKHERJEE NILOY;METZ MATTHEW V;RACHMADY WILLY;DEWEY GILBERT;KAYALIEROS JACK;CHAU ROBERT S |
发明人 |
MUKHERJEE NILOY;METZ MATTHEW V.;RACHMADY WILLY;DEWEY GILBERT;KAYALIEROS JACK;CHAU ROBERT S. |
| 分类号 |
H01L23/48;H01L21/44 |
主分类号 |
H01L23/48 |
| 代理机构 |
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| 主权项 |
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