| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL element wherein an auxiliary electrode is easily connected to an second electrode while an organic EL layer is vapor-deposited on the entire surface. Ž<P>SOLUTION: In the manufacturing method of a top emission type organic EL element, a plurality of pixels are formed on a substrate where a plurality of TFTs are formed. The organic EL element comprises a first electrode, a second transparent electrode provided to face the first electrode, and an organic EL layer sandwiched between the first electrode and the second electrode. The end part of the first electrode is covered with an insulating film, and the second electrode is connected to a metal film which is patterned on the insulating film. The manufacturing method of the organic EL element comprises a step in which a metal film pattern is formed on the insulating film, a step in which a wire mask is installed to overlap the formed metal film pattern under tension, a step in which an organic EL layer is formed on the entire surface of the substrate where the wire mask is installed, a step to remove the wire mask from the substrate, and a step to form the second electrode on the entire surface of the substrate from which the wire mask is removed. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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