| 摘要 |
PROBLEM TO BE SOLVED: To increase an yield at which a thermal head having high energy efficiency is obtained by preventing a pattern gap between a hollow thermal insulation layer and a heat generation portion. SOLUTION: The manufacturing method of the thermal head includes a step of forming a plurality of recesses 13 on the surface of a collective substrate 300A, a bonding step of thermally fusing an insulating film 5 to the surface of the collective substrate 300A in which the plurality of recesses 13 are formed by the step of forming the recesses, and a step of forming a plurality of heating resistors 7 arranged opposite to the recesses 13 on the insulating film 5, wherein the step of forming the recesses forms the recesses with reference to one recess 13 in such a manner that dimensions of other recesses 13 increase as the distance from the one recess 13 increases. COPYRIGHT: (C)2010,JPO&INPIT
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