发明名称 DISPLAY DEVICE AND MANUFACTURING METHOD THEREOF
摘要 A display device includes: a transparent substrate; gate electrodes which are stacked on the transparent substrate; semiconductor films which are stacked above the gate electrodes and constitute thin film transistors together with the gate electrodes; source electrodes and drain electrodes which are formed above the semiconductor films; an insulation film which is stacked between the source electrodes and the semiconductor films and between the drain electrodes and the semiconductor films; and contact holes which are formed in the insulation film so as to connect the source electrodes and the drain electrodes with the semiconductor films. The semiconductor film includes a connection region which is positioned at least below the contact hole and is connected with the source electrode, and a connection region which is positioned at least below the contact hole and is connected with the drain electrode, and impurities are implanted into the connection regions.
申请公布号 US2010032681(A1) 申请公布日期 2010.02.11
申请号 US20090536645 申请日期 2009.08.06
申请人 HITACHI DISPLAYS, LTD. 发明人 KURIYAGAWA TAKESHI;NODA TAKESHI;KAITOH TAKUO
分类号 H01L33/00;H01L21/336 主分类号 H01L33/00
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