APPARATUS FOR MEASUREMENT OF SILICON CONCENTRATION

摘要

The object aims to detect a trace quantity of silicon contained in a solution of interest by a simple means.  Thus, disclosed is an apparatus (1) for measuring the concentration of silicon in a solution of interest, which comprises an excitation light irradiation unit (2) for irradiating the solution with an excitation light for silicon, a light detection unit (3) for detecting a fluorescent light and/or a scattered light emitted from silicon in the solution upon the irradiation with the excitation light, and a calculation unit (41) for calculating the concentration of silicon in the solution based on the intensity of the fluorescent light and/or the scattered light.