DEFECT REVIEW DEVICE, DEFECT REVIEW METHOD, AND DEFECT REVIEW EXECUTION PROGRAM

摘要

Provided is a defect review device enabling identification of a defect and its defect coordinates (33). The defect review device includes a distance examination image creating section (5) for creating, by using an examination image (28), a distance examination image (29) wherein the distance values between the pixels constituting the contour of a real pattern (28a) and each of the pixels arrayed in the direction of the normal of the contour are determined, a distance design image creating section (6) for creating a distance design image (27) wherein the distance values between the pixels constituting the contour of a design pattern (26a) corresponding to the real pattern (28a) and each of the pixels arrayed in the direction of the normal of the contour are determined, a distance difference image creating section (9) for creating a distance difference image (30) wherein the difference between the distance values of the distance design image (27) and the distance examination image (29) is set for each of pixels, and a defect coordinate identifying section (10) for identifying the defect coordinates (33) of the pixel involving a defect (28b) by using the distance difference image (30).