发明名称 COMPUTER-IMPLEMENTED METHODS, COMPUTER-READABLE MEDIA, AND SYSTEMS FOR CLASSIFYING DEFECTS DETECTED IN A MEMORY DEVICE AREA ON A WAFER
摘要 Computer-implemented methods, computer-readable media, and systems for classifying defects detected in a memory device area on a wafer are provided.
申请公布号 WO2010014609(A2) 申请公布日期 2010.02.04
申请号 WO2009US51961 申请日期 2009.07.28
申请人 KLA-TENCOR CORPORATION;CHOI, SUNYONG;PAE, YEONHO;CHANG, ELLIS 发明人 CHOI, SUNYONG;PAE, YEONHO;CHANG, ELLIS
分类号 G06F19/00;G06F11/00 主分类号 G06F19/00
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