Dome temperature control system and plasma etching system thereof,申请号KR20070127889-传众专利搜索

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发明名称	Dome temperature control system and plasma etching system thereof
摘要
申请公布号	KR100940403(B1)	申请公布日期	2010.02.02
申请号	KR20070127889	申请日期	2007.12.10
申请人		发明人
分类号	H01L21/3065;H01L21/00;H01L21/02	主分类号	H01L21/3065
代理机构		代理人
主权项
地址

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