发明名称 Process and apparatus for producing a single crystal of semiconductor material
摘要 A process for producing a single crystal of semiconductor material, in which fractions of a melt, are kept in liquid form by a pulling coil, solidify on a seed crystal to form the growing single crystal, and granules are melted in order to maintain the growth of the single crystal. The melting granules are passed to the melt after a delay. There is also an apparatus which Is suitable for carrying out the process and has a device which delays mixing of the molten granules and of the melt.
申请公布号 US7655089(B2) 申请公布日期 2010.02.02
申请号 US20080242080 申请日期 2008.09.30
申请人 SILTRONIC AG 发明人 VON AMMON WILFRIED
分类号 C30B15/02;C30B13/00;C30B13/08;C30B13/10;C30B13/14;C30B13/16;C30B13/30;C30B29/06 主分类号 C30B15/02
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