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发明名称
Method of manufacturing single electron transistor
摘要
申请公布号
KR100939767(B1)
申请公布日期
2010.01.29
申请号
KR20030041577
申请日期
2003.06.25
申请人
发明人
分类号
H01L27/115
主分类号
H01L27/115
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代理人
主权项
地址
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