发明名称 |
Test device and semiconductor integrated circuit device |
摘要 |
A test device and a semiconductor integrated circuit are provided. The test device may include a first test region and a second test region defined on a semiconductor substrate. The first test region may include a first test element and the second region may include a second test element. The first test element may include a pair of first secondary test regions in the semiconductor substrate extending in a first direction. The second test element may include structures corresponding to the first test element except the second test element does not include structures corresponding to the pair of first secondary test regions.
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申请公布号 |
US2010013514(A1) |
申请公布日期 |
2010.01.21 |
申请号 |
US20090458535 |
申请日期 |
2009.07.15 |
申请人 |
SAMSUNG ELECTRONICS CO., LTD. |
发明人 |
LEE SAN-JIN;LEE GIN-KYU |
分类号 |
G01R31/26;H01L23/58 |
主分类号 |
G01R31/26 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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