| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a pressure sensor capable of suppressing the occurrence of discharge. Ž<P>SOLUTION: A reference electrode 8a and a fixed electrode 8b are embedded in an insulating material 9, such as, silicon dioxide (SiO<SB>2</SB>) and silicon nitride (SiN). According to such a configuration, it is possible to suppress occurrence of discharge by allowing a potential difference to occur between the fixed electrode 8b and a diaphragm section 7, when an Si substrate 1 is jointed to a glass substrate 4. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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