发明名称 |
Method and instrument for measuring complex dielectric constant of a sample by optical spectral measurement |
摘要 |
In order to measure a complex dielectric constant of a thin film on a substrate, a method includes irradiating the thin film sample with light at a first incident angle so that the light undergoes multiple internal reflections within the thin film sample. The method also includes measuring light that has transmitted through or reflected on the thin film sample following the multiple internal reflections, and determining a complex dielectric constant of the thin film sample based upon a spectrum of the transmitted or reflected light that has undergone the multiple internal reflections. |
申请公布号 |
US7649633(B2) |
申请公布日期 |
2010.01.19 |
申请号 |
US20040579781 |
申请日期 |
2004.11.22 |
申请人 |
NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCEAND TECHNOLOGY |
发明人 |
KAWATE ETSUO |
分类号 |
G01B11/02;G01N21/35;G01N21/84 |
主分类号 |
G01B11/02 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|