发明名称 MICROSCOPE DEVICE
摘要 <P>PROBLEM TO BE SOLVED: To adjust a positional relation between an aperture member and a modulator to gain superior contrast, in a microscope device which intensifies the contrast of a test piece to make observation. Ž<P>SOLUTION: The microscope device is provided with: a condenser lens which irradiates a test piece with light from a light source for transmission illumination; an aperture member which is arranged at the pupil position of the condenser lens; a modulator which is arranged at a conjugational position to the pupil face of an objective lens and has phase films different in phase and a light-reducing part which straddles the phase boundary of the phase films; and a moving means for adjusting contrast which relatively moves the aperture member and the modulator. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
申请公布号 JP2010008792(A) 申请公布日期 2010.01.14
申请号 JP20080169091 申请日期 2008.06.27
申请人 NIKON CORP 发明人 TOSHIMITSU KUNIO
分类号 G02B21/14;G02B21/00 主分类号 G02B21/14
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