| 摘要 |
<P>PROBLEM TO BE SOLVED: To restore a liquid repellency of a liquid repellent film while preventing a shape degradation of the liquid repellent film and a warpage of a substrate. Ž<P>SOLUTION: The patterning method of a liquid repellent film includes the steps of: forming the liquid repellent film on a substrate; forming a mask patterned in a predetermined shape on the liquid repellent film; patterning the liquid repellent film via the mask; removing the mask; and applying a fluorine plasma processing to the surface of the liquid repellent film. By this method, the problem is solved. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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