| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a vibrationproof device, a stage apparatus and an aligner which can control positions and postures of a structure highly precisely. <P>SOLUTION: The vibrationproof device insulates vibration by supporting structure, and is equipped with a first actuator to correct at least one of positions and postures of the structure, and a second actuator to correct the elastic deformation of the structure. <P>COPYRIGHT: (C)2010,JPO&INPIT |
