发明名称 |
MICRO-POSTS HAVING IMPROVED UNIFORMITY AND A METHOD OF MANUFACTURE THEREOF |
摘要 |
As discussed herein, there is presented an apparatus comprising micro-posts. The apparatus includes a substrate having a planar surface, a plurality of micro- posts located on the planar surface, wherein each micro- post has a base portion on the planar surface and a post portion located on a top surface of the corresponding base portion, and wherein side surfaces of the base portions intersect the planar surface at oblique angles. |
申请公布号 |
WO2010002445(A2) |
申请公布日期 |
2010.01.07 |
申请号 |
WO2009US03874 |
申请日期 |
2009.06.30 |
申请人 |
ALCATEL-LUCENT USA INC.;BOLLE, CRISTIAN, A.;PARDO, FLAVIO |
发明人 |
BOLLE, CRISTIAN, A.;PARDO, FLAVIO |
分类号 |
B81B7/04;H01L21/027 |
主分类号 |
B81B7/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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