发明名称 DLC COATING DEVICE FOR SCALING TIP AND MANUFACTURING METHOD OF SCALING TIP
摘要 PURPOSE: A DLC coating device for a scaling tip and a manufacturing method of the scaling tip are provided to lower surface roughness by reinforcing intensity of an end of the tip. CONSTITUTION: A DLC coating device for a scaling tip comprises a main body(11). A gas guide board(12), a tip(1), a hot filament(14) and a nozzle(15) are installed inside the main body. The tip is installed in a tip cooling body(13). A vacuum pump(16) and a feedback pump(17) are installed outside the main body. The vacuum pump discharges the air from the main body. The feedback pump circulates the gas within the vacuum pump and main body.
申请公布号 KR20100002594(A) 申请公布日期 2010.01.07
申请号 KR20080062543 申请日期 2008.06.30
申请人 MICRO-NX CO., LTD. 发明人 LEE, JONG GEON
分类号 C23C16/26;C23C16/27 主分类号 C23C16/26
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