发明名称 INTEGRATING A CAPACITOR IN A METAL GATE LAST PROCESS
摘要 A semiconductor device is provided which includes a semiconductor substrate having a first region and a second region, transistors having metal gates formed in the first region, and at least one capacitor formed in the second region. The capacitor includes a top electrode having at least one stopping structure formed in the top electrode, the at least one stopping structure being of a different material from the top electrode, a bottom electrode, and a dielectric layer interposed between the top electrode and the bottom electrode.
申请公布号 US2010001332(A1) 申请公布日期 2010.01.07
申请号 US20080256132 申请日期 2008.10.22
申请人 TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD. 发明人 CHUANG HARRY;LEE TZUNG-CHI;THEI KONG-BENG;CHUNG SHENG-CHEN;LIANG MONG-SONG
分类号 H01L29/92;H01L21/34 主分类号 H01L29/92
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