METHOD FOR THIN FILM GROWTH

摘要

PURPOSE: A method for a thin film growth is provided to improve the mobility of a carrier and a light scattering effect by improving a surface particle size and surface roughness of a thin film. CONSTITUTION: In a device, nuclei of the crystal grains having the various crystal growth direction are formed on the top of a substrate. First crystal particles having a first crystal growth direction(100) are preferentially grown up in order to form a first texture. Second crystal particles having a second crystal growth direction(111) are preferentially grown up in order to form a second texture. The area of surface of the second crystal particle is bigger than that of the first crystal particle.