SUBSTRATE FOR INKJET RECORDING HEAD, RECORDING HEAD, RECORDING DEVICE, AND MANUFACTURING PROCESS OF SUBSTRATE FOR INKJET RECORDING HEAD

摘要

<P>PROBLEM TO BE SOLVED: To provide a substrate for an inkjet recording head which can suppress generation of internal stress and prevent generation of a defective pattern in a foaming chamber, and to provide a recording head, a recording device and a manufacturing method for a substrate for an inkjet recording head. Ž<P>SOLUTION: The substrate for an inkjet recording head 11 is laminated with a flow path forming member 21 to be formed with a foam chamber 22 communicating with an ink channel 25 and an outlet port 23. The substrate for an inkjet recording head 11 is equipped with a planarized layer 1 having a plane upper surface which is formed in the position corresponding to a lower end surface 21b connected to a side-wall 21a of the foaming chamber 22 in the periphery of the foaming chamber 22 of the flow path forming member 21. Furthermore, the substrate for an inkjet recording head 11 is equipped with a contact surface 21c which is formed in the circumference of the planarized layer 1 and with which the flow path forming member 21 directly comes in contact. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž