| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a transfer device accurately irradiating a laser beam while suppressing enlargement of a large substrate. Ž<P>SOLUTION: This transfer apparatus 10 includes a chamber 20, a stationary pedestal 30 stored in the chamber 20 with a donor 11 and a substrate 12 fixed to it, a laser irradiating device 50, a movement mechanism 40 which moves the stationary pedestal 30 to position the donor 11 and the substrate 12 in the chamber 20. The chamber 20 includes a body 25 partitioned by frames in the moving direction of the stationary pedestal 30 while storing the donor 11, the substrate 12, and the stationary pedestal 30 in its inside, and having a plurality of openings 27-29 for a laser beam to penetrate, and a glass plate 26 through which the laser beam penetrates and which airtightly covers the openings 27-29. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
|
