| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a microscope apparatus acquiring an accurate sample image. Ž<P>SOLUTION: This microscope 1 is provided with: an illumination optical system 10 that has a diffraction grating 16 for spatially modulating the light emitted from a light source 11 and irradiates a sample 5 with the illumination light acquired by spatial modulation by the diffraction grating 16; an image forming optical system 30 for forming a modulation image from the sample 5 irradiated with the illumination light; an imaging element 35 for imaging the modulation image; a diffraction grating driving device 25 for modulating the phase of the illumination light; and an image processor 41 for forming the image of the sample 5 from a plurality of modulation images imaged by the imaging element 35 whenever the phase of the illumination light is modulated. The image processor 41 corrects the intensity of the image signal outputted from the imaging element 35 in the pixel unit of the imaging element 35, and converts it into the light quantity of the modulation image. Ž<P>COPYRIGHT: (C)2010,JPO&INPIT Ž
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