DUMMY EXPOSURE SUBSTRATE AND METHOD OF MANUFACTURING THE SAME, IMMERSION EXPOSURE APPARATUS, AND METHOD OF MANUFACTURING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a technology which is advantageous for dummy exposure in immersion exposure.

SOLUTION: A dummy exposure substrate 30 is used for the dummy exposure in an immersion exposure apparatus which exposes a substrate via a projection optical system and liquid. The dummy exposure substrate 30 includes: a lyophilic region 10; and a liquid-repellent region 20 surrounding the lyophilic region 10.

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