发明名称 PHOTOSENSOR, AND METHOD OF MANUFACTURING THE SAME
摘要 PROBLEM TO BE SOLVED: To provide a photosensor that suppresses the leakage current of a photodiode. SOLUTION: The photosensor includes: a first passivation film 41 formed in an upper layer of a thin-film transistor 52; an opening which is provided in the first passivation film 41 and electrically connects a drain electrode 13 with a lower electrode 14; a second passivation film 42 which coats the thin-film transistor 52 and the photodiode 51; upper layer wiring 23 which is formed in an upper layer of the second passivation film 42 and electrically connected with an upper electrode 15 via a contact hole provided in the second passivation film 42; and a connection film 16 formed in an upper layer than the upper electrode 14 so that the upper electrode 14 is not exposed when the contact hole is formed. COPYRIGHT: (C)2010,JPO&INPIT
申请公布号 JP2009295908(A) 申请公布日期 2009.12.17
申请号 JP20080150399 申请日期 2008.06.09
申请人 MITSUBISHI ELECTRIC CORP 发明人 HAYASHI MASAMI
分类号 H01L27/146;H01L21/336;H01L29/786;H01L31/10 主分类号 H01L27/146
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