SYMMETRIC THERMOCENTRIC FLEXURE WITH MINIMAL YAW ERROR MOTION

摘要

A stamping structure for imprinting micro-sized features is provided. The stamping structure includes one or more optical flats. A flexure arrangement includes a plurality of beam flexures arranged in a symmetric configuration around the one or more optical flats so as to minimize the error yaw motion (?z) from thermal fluctuations associated with fixturing the one or more optical flats.