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发明名称
VAPOR PHASE GROWING DEVICE AND METHOD THEREOF
摘要
申请公布号
JPH04261016(A)
申请公布日期
1992.09.17
申请号
JP19910011388
申请日期
1991.01.07
申请人
NIPPON TELEGR & TELEPH CORP <NTT>
发明人
TACHIKAWA MASAMI;MORI HIDEFUMI
分类号
H01L21/205
主分类号
H01L21/205
代理机构
代理人
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地址
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