| 摘要 |
PURPOSE: An excimer lamp is provided to control the extent of the illuminance degradation by including the ultraviolet radiation layer. CONSTITUTION: The discharge vessel(20) is made of the silica glass having the discharge space. The electric discharge gas is sealed in the discharge space(S). In a part of the lower surface of the discharge vessel, the ultraviolet radiation layer is formed. The ultraviolet radiation layer(30) comprises the accumulation structure A formed in one electrode. The ultraviolet radiation layer comprises the accumulation structure B at least formed in a part except the area corresponding to electrode. The accumulation structure A(31) comprises the silica including the OH group and the minute particle of high melting point. The OH group concentration of the silica particle is 10 wtppm or greater.
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