INSPECTION METHOD AND APPARATUS, LITHOGRAPHY APPARATUS, LITHOGRAPHY PROCESSING CELL, AND DEVICE MANUFACTURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide a scatterometer measuring method and apparatus that performs measurement using widely spaced wavelengths or wavelength ranges.

SOLUTION: The scatterometer has a radiation source that emits radiation with different first and second wavelength ranges. In order to perform color correction according to need in accordance with which wavelength range is used, a variable optical element is provided. Accordingly, the single scatterometer can perform measurement using widely spaced wavelengths.

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