发明名称 Stage drive method and stage unit, exposure apparatus, and device manufacturing method
摘要 When a transition from a first state where one stage is positioned at a first area directly below projection optical system to which liquid is supplied to a state where the other stage is positioned at the first area, both stages are simultaneously driven while a state where both stages are close together in the X-axis direction is maintained. Therefore, it becomes possible to make a transition from the first state to the second state in a state where liquid is supplied in the space between the projection optical system and the specific stage directly under the projection optical system. Accordingly, the time from the completion of exposure operation on one stage side until the exposure operation begins on the other stage side can be reduced, which allows processing with high throughput. Further, because the liquid can constantly exist on the image plane side of the projection optical system, generation of water marks on optical members of the projection optical system on the image plane side is prevented.
申请公布号 US2009296067(A1) 申请公布日期 2009.12.03
申请号 US20090461246 申请日期 2009.08.05
申请人 NIKON CORPORATION 发明人 SHIBAZAKI YUICHI
分类号 G03B27/58;G03F7/20 主分类号 G03B27/58
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