| 摘要 |
PROBLEM TO BE SOLVED: To provide a manufacturing method for a composition for electronic materials which maintains a conventional foreign matter removal ratio, has a small amount of a raw solution for filtration remaining in a filter housing, has high productivity, and is easy in exchange of a filter cartridge. SOLUTION: A filter 20 for the composition for electric materials comprises a first fixing member 21 having three first communicating openings, and three filter units 40 which are disposed parallel to each other and of which the one ends in the lengthwise direction are respectively connected with the first communicating openings. Each of the filter units 40 is provided with an approximately columnar filter housing 41 having a through-hole formed in at least one end face in the longitudinal direction, and an approximately columnar filter cartridge 42 disposed in the filter housing 41 and having a filter. COPYRIGHT: (C)2010,JPO&INPIT |
