发明名称 |
THERMO-OPTIC PHASE SHIFTER AND METHOD FOR MANUFACTURING SAME |
摘要 |
The thermo-optic phase shifter (200) according to an exemplary aspect of the invention includes: a substrate (201); a sacrificial layer (202) formed above the substrate (201); a first cladding layer (203) formed above the sacrificial layer (202) and having a film density higher than that of the sacrificial layer (202); an optical waveguide core (204) formed above the first cladding layer (203); a second cladding layer (205) provided over the first cladding layer (203) to cover the optical waveguide core (204); a heat-generating heater (206) provided to a region of the second cladding layer (205) directly above the optical waveguide core (204); and a groove (207) formed in a side face region of the optical waveguide core (204) and extending from the surface of the second cladding layer (205) to the surface of the substrate (201).
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申请公布号 |
US2009297092(A1) |
申请公布日期 |
2009.12.03 |
申请号 |
US20070443319 |
申请日期 |
2007.10.10 |
申请人 |
TAKAHASHI MORIO |
发明人 |
TAKAHASHI MORIO |
分类号 |
G02F1/01;B05D5/06;C23C14/34;C23C16/513;C23F1/00 |
主分类号 |
G02F1/01 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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