| 摘要 |
PROBLEM TO BE SOLVED: To provide a sample holding mechanism which does not cause any trouble even if two sheets of substrate samples are transferred, for example, to a pressure bonding step while these substrate samples are mounted to the sample holding mechanism. SOLUTION: The substrate sample holding mechanism is constituted of a plate type frame and a pushing unit to hold substrate samples in a region surrounded by the plate type frame in such a way that only the end surface of external circumferential part of each substrate sample is in contact with the holding mechanism. The sample holding mechanism does not cause any trouble even if the substrate sample is transited to a pressure-bonding operation while it is mounted to the sample holding mechanism by thinning the sample holding mechanism more than the substrate sample. COPYRIGHT: (C)2010,JPO&INPIT |
