| 摘要 |
<P>PROBLEM TO BE SOLVED: To provide a coating apparatus capable of stabilizing the gap between a substrate and a coater, controlling the speed of a substrate one by one, carrying out frame coating, and forming no scratch in the rear face of a substrate. <P>SOLUTION: The coating apparatus includes a coater 3b for applying a coating liquid to top of a substrate P, a backing roll 5 rotably and drivably disposed below the coater 3b, having suction holes 7 in the outer circumference and transporting the substrate P with suction, transporting rollers 6a and 6b installed at positions lower than the backing roll 5 upstream and downstream of the backing roll 5 and for transporting the substrate P with suction, a carrying-in conveyer installed upstream of the upstream transporting roller 6a for carrying the substrate P into the backing roll 5, and a carrying-out conveyer installed downstream of the downstream transporting roller 6b for carrying the substrate P out of the backing roll 5. <P>COPYRIGHT: (C)2010,JPO&INPIT |
